Chamber Component Position Parameters

Parameters on the Position tab are used to specify the position and (angular) orientation of a chamber component.

An component's position and orientation can be specified in:

• the target chamber coordinate system
• the coordinate system of the chamber's Target Mount axes
• the coordinate system of any diagnostic port.

In the case of using a diagnostic port as the reference coordinate system, the origin is at target chamber center, and the z-axis points at the diagnostic port. The x-axis points in the positive θ direction, where θ is the target chamber polar angle.

When changing the Reference Coordinate System for a Chamber Component, it is possible to have the Position and Orientation Angles automatically re-computed. To do this, check the box at the bottom of the Position tab prior to changing the Reference Coordinate System. The new values are then automatically entered in the boxes when the coordinate system is changed.

When changing the Coordinate System in the Position box (e.g., from Cartesian to Spherical), the position values are automatically updated such that the position vector is maintained even if the "Automatically Update Position" option is not checked. This feature can be turned off in the User Interface tab of the Preferences dialog.

In the Position box, the user specifies the position of the component. This can be done in Cartesian, cylindrical, or spherical coordinate system geometries.

In the Orientation Angles box, the user can specify the orientation of the component. This is done using 3 angles: "polar", "azimuthal", and "rotation". See Specifying Orientation Angles for definitions, and details on setting these angles.

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